מחמם ייבוש לפרוסת Micro LED

Sat, 06 Jun 2026 01:40:55 +0800

On a Micro LED line, drying isn’t a “break” you can take—it’s a yield lever you can’t afford to mishandle. A temperature hiccup during photoresist soft bake or post-clean drying will pull linewidths off target, leave behind residues, and send particle counts climbing. When the heater slips, the scheduler pays for it—in scrap and rework.

What matters under the hood

We built this wafer drying heater around short-wave infrared elements and a quartz-isolated thermal path. The point is wafer-level uniformity you can trust, within ±0.1°C. Setpoint settles quickly, and the profile repeats run after run, so photoresist bakes stay inside the thermal budget without overshoot.
The chamber is engineered for cleanroom Class 1–100 operation. Welded joints and low-outgas materials keep particle generation at zero during the dry cycle.

מיקרו on Gentle Home Infrared Warmth

מחמם ייבוש לפרוסת Micro LED

What matters under the hood