Below you will find pages that utilize the taxonomy term “Lab” High temp furnace for fab lab On the fab floor, a 2°C swing during photoresist bake is enough to shift a linewidth by nanometers. A single particle during drying can kill a lot.... Read more...
High temp furnace for fab lab On the fab floor, a 2°C swing during photoresist bake is enough to shift a linewidth by nanometers. A single particle during drying can kill a lot.... Read more...